Optics and Vacuum Equipment Development for Research Collaboration at TIRI, NARLabs

Chong-Lun Wei¹, Ming-Fu Chen¹, Chi-Chung Kei¹, Chien-Nan Hsiao¹, Fong-Zhi Chen^1*

¹Taiwan Instrument Research Institute, National Applied Research Laboratories, Hsinchu, Taiwan

* Presenter:Fong-Zhi Chen, email:chen@narlabs.org.tw

Using instruments promotes the progress of science, and it also improves human life. In Taiwan, TIRI (Taiwan Instrument Research Institute) plays such an important role enhancing their instrumentation capabilities to deliver outstanding partnership and services in academic research with professionalism in instrument technology. TIRI is a national research institute under the supervision of NARLabs (National Applied Research Laboratories) and is renowned for its R&D capability for optics and vacuum equipment. Besides, TIRI established the one-stop service platform for supporting biomedical device startups in recent years. In this presentation, the instrumentation capabilities of TIRI are introduced. The presenter highlights a number of research collaboration achievements, including services and instrument customization which is greatly beneficial to academic exploration. The ALD/ALE system and its application to thin film study is introduced to demonstrate the equipment capabilities and collaboration opportunities. A case of microscope delivery shows that TIRI has the capability to support advanced academic investigation in ultra-precision aspherical optics fabrication and customized lens design service. Aiming to promote interdisciplinary cooperation, TIRI has established the R&D consortium and alliance, whose activities are introduced in the presentation. TIRI has been sustainably devoted to developing precise and customized instruments, supporting domestic advanced research. TIRI has always been a committed ally for instrumentation and research collaboration.

Keywords: TIRI, Instrementation, Optics, Vacuum equipment