X-ray Nanodiffraction for Microstructural Image and the Applications on Material Science

Ching-Yu Chiang^1*, Chia-Hsien Lin¹

¹Materials Science Group, National Synchrotron Radiation Research Center, Hsinchu, Taiwan

* Presenter:Ching-Yu Chiang, email:chiang.cy@nsrrc.org.tw

The X-ray Nanodiffraction Beamline (XND) at BL-21A in Taiwan Photon Source (TPS) was dedicated to using the focusing white/mono-beam diffraction for structural analysis. With an 80x80 nm focus x-ray beam onto the sample, users could obtain the 2D distribution of crystal phases, orientation, residual strain, stress, and dislocation maps for materials in a complex form without distorting the sample geometry during measurement. Furthermore, this end-station also provided many complementary tools. Tetra-probe stages could deploy several scanning probes to collect optical, electrical, surface properties with tens of nanometer resolution of specimens; the x-ray fluorescence detector provides elemental information and the cryo-stage integrated with heater for temperature dependence experiments. Particularly, it is also the first time in synchrotron history to integrate an online scanning electron microscopy (SEM) as a navigator. With spatial resolution down to 4 nm, it is able to find out the interest region with a tiny structure on samples and also arrange the position for different probes. This end-station can function either in vacuum or ambient environments depending on the user’s demands. In summary, the TPS 21A end-station will provide not only 2D-XRD but also nano-XRF, nano-XAS, nano-XEOL, and SEM information for diverse research programs. This talk will introduce the capabilities and the commissioning results of XND, also as well as some experimental results from nano-sized structural determination [2], strain map on the semiconductor device, phase study on 2D energy materials to demonstrate the unique TPS 21A end-station.

Keywords: Nanodiffraction, Nanobeam Absorption, Micro strain, X-ray fluorescence map