2D Indium Nitride Nanosheets Synthesized via the Ammonolysis of Liquid Metal Printed Oxide
Chia-Chi Kuo1*, Chang-Hsun Huang1, Yi-Chia Chou1
1Electrophysics, National Yang Ming Chaio Tung University, Hsinhsu, Taiwan
* Presenter:Chia-Chi Kuo, email:alex02061912@gmail.com
Due to the discovery of graphene and realization of its remarkable properties, considerable researches of other two dimensional (2D) materials were undertaken [1]. 2D indium nitride (InN) is expected to be extremely low electron mass, and the highest electron mobility among 2D group III nitrides [2]. Recent studies show the capabilities to synthesize ultrathin nanosheets of nonlayered materials that have been predicted through computational methods [3]. Liquid metals have been proposed as a reaction medium that allows large-area 2D oxides to be synthesized [4]. In this study, a low-cost fabrication process of thin indium nitride was developed by using an ammonolysis method on liquid metal printed thin indium oxide (InOx) nanosheets through hydride vapor phase epitaxy.
Beginning with liquid metal printing method, the InOx nanosheets was made by firmly pressing the SiO₂/Si substrate onto the indium droplet which was placed on a hot plate. The InOx nanosheets were then converted into InN using a high temperature ammonolysis reaction in the furnace. The converted InN nanosheets were also produced at different temperature to observe how element composition changed. Transmission electron microscope, Atomic force microscope, Raman spectrum, X-ray photoelectron spectroscopy, and electronic measurement were used to analyze the microstructure, element composition, and electrical performance.

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Keywords: Indium nitride, Liquid metal printing, 2D material