Study of Hollow Cathode Enhanced Radio Frequency Capacitively Coupled Plasma Discharges - Effect of Frequency

Hsuan, Ho Yen^1*, Chang, Yu Wu¹, Hsin, Chang Chang¹, Keh, Chyang Leou¹

¹Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan

* Presenter:Hsuan, Ho Yen, email:s109011551@m109.nthu.edu.tw

In this simulation study, 3 gaseous species and 4 reactions of argon plasma discharge which generated by a 13.56, 27.12, 54.24 MHz radio frequency (RF) power are included and they have been investigated by fluid model numerical simulations (CFD-ACE+, ESI Corp.). Furthermore, the trench at the ground electrode (GE) is added to the model and the simulation results will be compared with the previous literature which add the trench at the powered electrode (PE). The correlation between the plasma properties and the operating parameters will be discussed further. And model parameter(e.g. trench depth, applied power, operating pressure and frequency) will influence the hollow cathode effect (HCE).

Keywords: Hollow Cathode, Radio Frequency Capacitively Coupled Plasma, Effect of Frequency