Scale-up of antiferroelectric TiO₂/ZrO₂/TiO₂ stack with ultra-high energy storage density for supercapacitor application
Yu-Tung Yin1*, Sheng-Han Yi1, Hsin-Chih Lin,1, Miin-Jang Chen1
1Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan
* Presenter:Yu-Tung Yin,
In this studying, an antiferroelectric (AFE) TiO2/ZrO2/TiO2 multi-stack structure has been proposed. Through the interdiffusion between TiO2/ZrO2 interface, a compressive chemical pressure has arisen and leads to a reduction of hysteresis, which results in a high ESD and low energy loss. A record-high energy storage density (ESD) of 94 J cm-3 and high efficiency of 80% along with a high maximum power density up to 5x1010 W kg-1 has been demonstrated by a single-stacked TiO2/ZrO2/TiO2 AFE capacitor. Furthermore, the TiO2/ZrO2/TiO2 multi-stacked structure also alleviates the decline of energy storage performance with the increase of the film thickness. A high ESD of 80 J cm-3 and efficiency of 82% has been demonstrated on the TiO2/ZrO2/TiO2 structure with thickness scaled up to 48 nm, and the improvement can be attributed to the superior breakdown strength from the barrier effect of interfaces on electrical trees. Furthermore, the capacitors also exhibit an excellent endurance up to 1010 operation cycles. With the combination of excellent endurance up to 1010 operation cycles, high ESD, high efficiency, high power density, and scalability, the TiO2/ZrO2/TiO2 multi-stacked structures demonstrated a promising prospect on supercapacitor applications.

Keywords: antiferroelectric, thin film, ZrO2, energy storage, supercapacitor